AK Tech Home  |  Sitemap  |  Korean
Company Products Facilities Quality Assurance Customer Center
 
  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
products
Bellows
Valve
Rectangular Gate Valve
Protection Gate Valve
Auto Gate Valve
Pneumatic Gate Valve
Manual Gate Valve
Remote Plasma Control Valve
HeatedAngle Valve
2Stage Angle Valve
Butterfly Gate Valve
Rendulum Gate Valve
Heater
Magnetic Seal
Assembly
ESC(Electrostatic Chuck)
LCD Valve
 
bullet Valve
HOME > products > Valve
 

Manual Gate Valve

** Application


- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System


** Features


- Manual Operation
- Particle – Free
- Vibration – Free
- Shaft & Welded bellows Seal (AM350)
- Easy to service
- Operation Lock Button


** Options


- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Bellows Material (SS316L , Inconel )
Products Info

Valve_map11.gif

SIZE : ISO-40, 50, 63,80, 100, 125, 160, 200, 250, 320, 350,400, 450, 500
Dimensions Approximate

**Specifications


Pressure range 5 X10-7mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows SS316L (option Inconel)
Valve actuator
AL6061, SS304
Seal Materials VITON (option KALREZ)
Temperature Valve body 120°C (option 180°C)
Valve actuator 80°C
Operation Single acting
Cycle until first service ≥ 50,000
Position sensor (open/close) - Reed switch SMC(D-A93)
     
 
  Company Message from the CEO  |   General Information  |  History of AK Tech   |   Organization   |   Vision   |   Location
Products Bellows   |   Valve   |   Heater   |   Magnetic Seal   |   Assembly   |   ESC(Electrostatic Chuck)   |   LCD Valve   |  
Facilities Equipment  |   Factory
Quality Assurance Quality Assurance
Customer Center Notice   |   Contact Infomation   |   Download
 
 
AK Tech 125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr
Copyrights(c) 2011 AK Tech Co.,Ltd. All Rights Reserved.